Photonics chips with an edge coupler and a continuous crackstop

US11543606B2 · kind B2 · utility

Assignee

• GLOBALFOUNDRIES U.S. Inc. · US

Inventors

• Nicholas A. Polomoff · Irvine, US
• Jae Kyu Cho · Niskayuna, US
• Frank Kuechenmeister · Dresden, DE
• John J. Ellis-Monaghan · Grand Isle, US
• Michal Rakowski · Ballston Lake, US

Key dates

• Filing date: Mar 9, 2021
• Grant date: Jan 3, 2023
• Expiry date: May 6, 2041

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B6/30
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

Structures including an edge coupler and a crackstop, as well as methods of forming a structure including an edge coupler and a crackstop. A waveguide core and a crackstop are located over a top surface of a dielectric layer. A communication passageway is either optically coupled or electrically coupled to the waveguide core. The communication passageway, which may include an electric conductor or a buried waveguide core, extends laterally beneath the crackstop.