Patent · US Active

System and method for optical-path coupling of light for in-situ photochemical cleaning in projection imaging systems

US11543757B2 · kind B2 · utility

0Cited by
7References
40Claims
0Family size

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Key dates

Filing dateApr 20, 2021
Grant dateJan 3, 2023
Priority date—
Expiry dateApr 20, 2041

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01N2021/95676
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

Systems for cleaning optical surfaces of overlay inspection systems are disclosed. In particular, systems for optical-path coupling of light for in-situ photochemical cleaning in projection imaging systems are disclosed. A system for cleaning optical surfaces of overlay inspection systems includes a first illumination source, a detector, a set of illumination optics, and a set of imaging optics. In some embodiments, the system may include at least one of a second illumination source and a third illumination source, each of which may be configured to cause or aid the removal of contaminants from one or more optical surfaces of the system.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.