Multiple beam secondary ion mass spectrometry device
US11545352B2 · kind B2 · utility
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4References
15Claims
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Key dates
| Filing date | Apr 24, 2019 |
| Grant date | Jan 3, 2023 |
| Priority date | — |
| Expiry date | Apr 24, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2527
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A secondary ion mass spectrometer comprising a primary ion beam device, and means for collecting, mass filtering and subsequently detecting secondary ions released from a sample due to the sample having been impacted by a plurality of primary ion beams. The secondary ion mass spectrometer is remarkable in that it uses a plurality of primary ion beams in parallel for scanning the surface of the sample.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.