Gyroscope and fabrication process

US11548805B2 · kind B2 · utility

Assignee

• THE REGENTS OF THE UNIVERSITY OF MICHIGAN · US

Inventors

• Khalil Najafi · Ann Arbor, US
• Jae Yoong Cho · Ann Arbor, US
• Ali Darvishian · Ann Arbor, US
• Guohong He · Ann Arbor, US
• Behrouz Shiari · Ann Arbor, US
• Tal Nagourney · Ann Arbor, US

Key dates

• Filing date: Dec 23, 2019
• Grant date: Jan 10, 2023
• Expiry date: Jun 13, 2041

Classification

• Technology area (CPC G): Physics
• CPC primary: G01D5/34
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

Gyroscopes are sensors that measure angular rate and angular orientation. A three-dimensional fused silica micro shell rate-integrating gyroscope is presented. One aspect of the gyroscope includes the use of optical sensors to detect motion of the resonator. The proposed gyroscope is attractive because it achieves several magnitudes higher accuracy as well as high vibration and shock insensitivity from a novel resonator design as well as other unique manufacturing processes.