Coating of nano-scaled cavities
US11549184B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 1, 2021 |
| Grant date | Jan 10, 2023 |
| Priority date | — |
| Expiry date | Oct 1, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05K3/42
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Methods, systems, and apparatus for coating the internal surface of nano-scale cavities on a substrate are contemplated. A first fluid of high wettability is applied to the nano-scale cavity, filling the cavity. A second fluid carrying a conductor or a catalyst is applied over the opening of the nano-scale cavity. The second fluid has a lower vapor pressure than the first fluid. The first fluid is converted to a gas, for example by heating the substrate. The gas exits the nano-scale cavity, creating a negative pressure or vacuum in the nano-scale cavity. The negative pressure draws the second fluid into the nano-scale cavity. The conductor is deposited on the interior surface of the nano-scale cavity, preferably less than 10 nm thick.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.