Enhanced microfabrication using electrochemical techniques
US11549903B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 10, 2019 |
| Grant date | Jan 10, 2023 |
| Priority date | — |
| Expiry date | Nov 12, 2041 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81C2201/0139
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method is provided for subtractively processing a layer of etchable material formed over an electrically conductive surface region of a workpiece. The workpiece is immersed in a liquid solution, generally but not exclusively a conductive solution, that comprises an etchant for the etchable material, so that etching of the etchable material is initiated. An electric circuit is connected to include a control electrode, a reference electrode, and the electrically conductive surface region of the workpiece. The electric circuit is used to monitor the development process dynamically at each of a plurality of intervals during the etching. The etching is terminated when the electrochemical signal satisfies a criterion indicating that the etching is complete.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.