Small angle optical beam steering using micro-electro-mechanical system (MEMS) micro-mirror arrays (MMAS)
US11550146B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 19, 2021 |
| Grant date | Jan 10, 2023 |
| Priority date | — |
| Expiry date | Jul 24, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0833
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Small angle optical beam steering is performed using a Micro-Electro-Mechanical System (MEMS) Micro-Mirror Array (MMA) that minimizes diffraction for a specified steering angle, Generally speaking, this is accomplished with a MEMS MMA that exhibits a “piston” capability to translate individual mirrors in addition to the tip and tilt capabilities. Adjacent mirrors can be tipped/tilted to the specified steering angle and then translated by a requisite amount to approximate a continuous surface. For a specified steering angle, the MEMS MMA is partitioned into one or more sections with each section including the maximum number of mirrors that can be grouped together and actuated to approximate a continuous surface given a maximum translation z. As a result, the only edge discontinuities exist between adjacent sections thereby minimizing distortion for a given steering angle.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.