Miniaturized vacuum package and methods of making same
US11551921B1 · kind B1 · utility
1Cited by
2References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 13, 2021 |
| Grant date | Jan 10, 2023 |
| Priority date | — |
| Expiry date | Oct 13, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2223/54486
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The present disclosure relates to an integrated package having an active area, an electrical routing circuit, an optical routing circuit, and a vacuum vessel. Methods of making such a package are also described herein.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.