Spatially variable dielectric layers for digital microfluidics
US11554374B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 15, 2021 |
| Grant date | Jan 17, 2023 |
| Priority date | — |
| Expiry date | Jul 26, 2041 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB01L2400/0427
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A digital microfluidic device including an active matrix of propulsion electrodes controlled by thin-film-transistors. The device includes at least two areas of different propulsion electrode densities. One area may be driven by directly-driving the propulsion electrodes from a power supply or function generator. In the first, higher density region; a first dielectric layer covers the propulsion electrodes. The first dielectric layer has a first dielectric constant and a first thickness. In the second, lower density region, a second dielectric layer has a second dielectric constant and a second thickness covering the propulsion electrodes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.