Patent · US Active

Method for closing openings in a flexible diaphragm of a MEMS element

US11554952B2 · kind B2 · utility

0Cited by

1References

12Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Bernhard Gehl · Wannweil, DE
Christoph Hermes · Kirchentellinsfurt, DE
Juergen Butz · Aspach, DE

Key dates

Filing date	Dec 20, 2018
Grant date	Jan 17, 2023
Priority date	—
Expiry date	Aug 15, 2039

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB81C2201/0197
WIPO fieldMicro-structural and nano-technology
WIPO sectorChemistry

Abstract

A method for closing openings in a flexible diaphragm of a MEMS element. The method includes: providing at least one opening in the flexible diaphragm, situating sealing material in the area of the at least one opening, melting-on at least the applied sealing material in the area of the at least one opening, and subsequently cooling the melted-on material to close the at least one opening.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.