Patent · US Active

Sample analyzer and analyzing method thereof

US11555779B2 · kind B2 · utility

0Cited by
0References
4Claims
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Assignee

Inventors

Key dates

Filing dateApr 7, 2020
Grant dateJan 17, 2023
Priority date
Expiry dateMar 27, 2041

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01J2237/24455
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

The present disclosure provides a sample analyzer and an analyzing method thereof. The sample analyzer includes a first beam source configured to provide a first energy beam to a sample, a second beam source configured to provide a second energy beam, which is different from the first energy beam, to the sample, a reflected beam sensor disposed between the second beam source and the sample to detect a reflected beam of the second energy beam, which is reflected by one side of the sample, and a transmitted beam sensor disposed adjacent to the other side of the sample to detect a transmitted beam of the second energy beam.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.