Semiconductor-type battery-free gas sensor or humidity sensor including porous metal-organic framework and method of manufacturing the same
US11555797B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 12, 2020 |
| Grant date | Jan 17, 2023 |
| Priority date | — |
| Expiry date | May 11, 2041 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02A50/20
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present inventive concept relates to a battery-free gas sensor or humidity sensor comprising a metal-organic framework and a method of manufacturing the same. In a photodiode-type battery-free gas sensor or humidity sensor according to the present inventive concept, since photoelectron collection electrodes are formed at certain intervals between P-N junction layers, when gas is adsorbed thereon, the gas can be detected without an extra power source by change of photocurrent. Due to fine pores of the metal-organic framework, gas sensitivity may be increased and stability of catalysts may be improved. When catalysts are not provided, humidity may be detected. Therefore, a system that used the photodiode-type battery-free gas sensor and the photodiode-type battery-free humidity sensor together may be performed humidity correction to accurately measure an amount of a gas.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.