Transport system, processing system, and article manufacturing method
US11557954B2 · kind B2 · utility
0Cited by
3References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 24, 2018 |
| Grant date | Jan 17, 2023 |
| Priority date | — |
| Expiry date | Oct 14, 2041 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB65G2203/042
- WIPO fieldHandling
- WIPO sectorMechanical engineering
Abstract
In a transport system that moves a moving portion, which moves in a transport direction along a fixed portion, while detecting a position of the moving portion by a scale and a sensor, a guide block is installed on a second surface of a first part of the moving portion, a guide rail is installed on a first surface of the fixed portion, the scale is installed at an end of the first part of the moving portion on an opposite side across the guide block, and a sensor that has a detecting unit at a position facing the scale is installed in the fixed portion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.