Mask and manufacturing method thereof, fine metal mask, mask device and use method thereof
US11560615B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Nov 29, 2019 |
| Grant date | Jan 24, 2023 |
| Priority date | — |
| Expiry date | Feb 16, 2040 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/24
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A mask, a manufacturing method thereof, a fine metal mask, a mask device and a use method thereof are provided. The mask includes at least one opening region and a shielding part surrounding and defining the at least one opening region. The shielding part includes a main part and at least one protrusion, in each opening region, the protrusion is protruded towards the opening region on a side of the main part facing the opening region; the main part includes an edge disposed on a side of the protrusion opposite to the opening region and with an extension direction being a same with an extension direction of the protrusion, the protrusion and a portion of the main part disposed between the edge and the protrusion includes a thinning portion with a thickness being less than a thickness of other portions of the shielding part.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.