Patent · US Active

Catadioptric lens and optical system comprising such a lens

US11561381B2 · kind B2 · utility

0Cited by

15References

20Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Konstantin Forcht · Aalen, DE
Dirk Doering · Erfurt, DE

Key dates

Filing date	Aug 19, 2019
Grant date	Jan 24, 2023
Priority date	—
Expiry date	Jan 25, 2041

Classification

Technology area (CPC G)Physics
CPC primaryG02B17/0856
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A catadioptric lens includes at least two optical elements arranged along an optical axis. Both optical elements are configured as a mirror having a substrate and a highly reflective coating applied to an interface of the substrate. The highly reflective coating extends from the interface of the substrate along a surface normal. At least one of the highly reflective coatings has one or a plurality of layers. The optical total layer thickness of the one layer of the plurality of layers increases radially from the inner area outward.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.