Patent · US Active

Flow controller, valve arrangement and method

US11561560B2 · kind B2 · utility

0Cited by
4References
19Claims
0Family size

Assignee

Inventors

Key dates

Filing dateAug 23, 2021
Grant dateJan 24, 2023
Priority date
Expiry dateAug 23, 2041

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10T137/7761
  • WIPO fieldControl
  • WIPO sectorInstruments

Abstract

A flow controller includes a valve unit for influencing the flow of a fluid through a fluid channel, a flow sensor for detecting the flow of the fluid through the fluid channel, a pressure sensor arrangement for detecting a fluid pressure of the fluid, and a control unit which is adapted to, in response to the flow being within a measurement range of the flow sensor, assume a first operating mode, and, in the first operating mode, to perform a first closed-loop flow control on the basis of the flow detected by the flow sensor, and, in response to the flow being outside the measurement range of the flow sensor, assume a second operating mode, and, in the second operating mode, to perform an open-loop flow control on the basis of the detected fluid pressure and/or to perform a second closed-loop flow control on the basis of the detected fluid pressure.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.