Flow controller, valve arrangement and method
US11561560B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 23, 2021 |
| Grant date | Jan 24, 2023 |
| Priority date | — |
| Expiry date | Aug 23, 2041 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/7761
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A flow controller includes a valve unit for influencing the flow of a fluid through a fluid channel, a flow sensor for detecting the flow of the fluid through the fluid channel, a pressure sensor arrangement for detecting a fluid pressure of the fluid, and a control unit which is adapted to, in response to the flow being within a measurement range of the flow sensor, assume a first operating mode, and, in the first operating mode, to perform a first closed-loop flow control on the basis of the flow detected by the flow sensor, and, in response to the flow being outside the measurement range of the flow sensor, assume a second operating mode, and, in the second operating mode, to perform an open-loop flow control on the basis of the detected fluid pressure and/or to perform a second closed-loop flow control on the basis of the detected fluid pressure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.