Array substrate, method for preparing the same, and display device
US11569275B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Feb 13, 2020 |
| Grant date | Jan 31, 2023 |
| Priority date | — |
| Expiry date | Aug 3, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D86/60
Abstract
The present disclosure provides an array substrate, a method for preparing the same, and a display device. The method includes: forming a metal layer on a base substrate; coating a photoresist on the metal layer; exposing the photoresist by a mask plate in such a manner that an amount of light acting on a first photoresist portion is less than that of light acting on a second photoresist portion to form a first photoresist reserved portion located and a second photoresist reserved portion located; after etching off the metal portion, stripping the first photoresist reserved portion and the second photoresist reserved portion, to obtain the first metal pattern located in the fan-out area and the second metal pattern located in the display area, in which a period size of the first metal pattern being smaller than a period size of the second metal pattern.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.