Patent · US Active

Memory device comprising a top via electrode and methods of making such a memory device

US11569437B2 · kind B2 · utility

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15Claims
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Assignee

Inventors

Key dates

Filing dateApr 22, 2020
Grant dateJan 31, 2023
Priority date
Expiry dateNov 20, 2040

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D1/716

Abstract

An illustrative device disclosed herein includes at least one layer of insulating material, a conductive contact structure having a conductive line portion and a conductive via portion and a memory cell positioned in a first opening in the at least one layer of insulating material. In this illustrative example, the memory cell includes a bottom electrode, a memory state material positioned above the bottom electrode and an internal sidewall spacer positioned within the first opening and above at least a portion of the memory state material, wherein the internal sidewall spacer defines a spacer opening and wherein the conductive via portion is positioned within the spacer opening and above a portion of the memory state material.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.