Aluminum nitride film, method of manufacturing aluminum nitride film, and high withstand voltage component
US11572275B2 · kind B2 · utility
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Key dates
| Filing date | Jun 1, 2021 |
| Grant date | Feb 7, 2023 |
| Priority date | — |
| Expiry date | Jul 24, 2041 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC01P2006/90
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An aluminum nitride film includes a polycrystalline aluminum nitride. A withstand voltage of the aluminum nitride film is 100 kV/mm or more.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.