Capacitive diaphragm vacuum gauge including a pressure sensor with multiple recesses being formed in the diaphragm
US11573142B2 · kind B2 · utility
1Cited by
9References
8Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 18, 2021 |
| Grant date | Feb 7, 2023 |
| Priority date | — |
| Expiry date | Apr 26, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L21/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A pressure sensor includes a diaphragm of a thin plate shape, the diaphragm forming part of a wall surface of a pressure chamber into and out from which a measurement target fluid flows. Multiple recesses are formed in the diaphragm on a side in contact with the measurement target fluid, and an interval between adjacent two of the multiple recesses is 10 μm or less.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.