Image processing method and device for CDSEM
US11573188B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 10, 2021 |
| Grant date | Feb 7, 2023 |
| Priority date | — |
| Expiry date | Aug 26, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L22/20
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention provides an image processing method for CDSEM for determining a measuring range of an image of a target pattern measured by a CDSEM machine. The image processing method of CDSEM comprises: obtaining a first gray scale image based on the image of the target pattern; performing Fourier transform to the first gray scale image to obtain a first frequency spectrum distribution; filtering out frequency spectrum components whose absolute values of ordinate are greater than preset threshold in the first frequency spectrum distribution to obtain a second frequency spectrum distribution, the preset threshold relates to the background noise and the signal frequency of SRAF features; and determining the measuring range based on the second frequency spectrum distribution.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.