Patent · US Active

Microwave integrated quantum circuits with vias and methods for making the same

US11574230B1 · kind B1 · utility

2Cited by
147References
17Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJul 22, 2020
Grant dateFeb 7, 2023
Priority date
Expiry dateJul 22, 2040

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10S977/933
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A quantum computing system that includes a quantum circuit device having at least one operating frequency; a first substrate having a first surface on which the quantum circuit device is disposed; a second substrate having a first surface that defines a recess of the second substrate, the first and second substrates being arranged such that the recess of the second substrate forms an enclosure that houses the quantum circuit device; and an electrically conducting layer that covers at least a portion of the recess of the second substrate.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.