Patent · US Active

Tungsten pentachloride conditioning and crystalline phase manipulation

US11577967B2 · kind B2 · utility

0Cited by

7References

4Claims

0Family size

Assignee

L'Air Liquide, Societe Anonyme Pour l'Etude et l'Exploitation des Procedes Georges Claude · FR

Inventors

Feng Li · San Jose, US
Sonia Plaza · Lescherolles, FR
Jean-Marc Girard · Versailles, FR
Nicolas Blasco · Grenoble, FR
Yumin Liu · Fussa, JP

Key dates

Filing date	Dec 16, 2020
Grant date	Feb 14, 2023
Priority date	—
Expiry date	Aug 11, 2041

Classification

Technology area (CPC C)Chemistry; Metallurgy
CPC primaryC01P2002/72
WIPO fieldMaterials, metallurgy
WIPO sectorChemistry

Abstract

A process of conditioning tungsten pentachloride to form specific crystalline phases are disclosed. The specific crystalline phases permit stable vapor pressures over extended periods of time during vapor deposition and etching processes.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.