Temperature coefficient of offset compensation for force sensor and strain gauge
US11579028B2 · kind B2 · utility
3Cited by
212References
19Claims
0Family size
Assignee
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Key dates
| Filing date | Oct 17, 2018 |
| Grant date | Feb 14, 2023 |
| Priority date | — |
| Expiry date | Oct 17, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L1/26
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
MEMS force sensors for providing temperature coefficient of offset (TCO) compensation are described herein. An example MEMS force sensor can include a TCO compensation layer to minimize the TCO of the force sensor. The bottom side of the force sensor can be electrically and mechanically mounted on a package substrate while the TCO compensation layer is disposed on the top side of the sensor. It is shown the TCO can be reduced to zero with the appropriate combination of Young's modulus, thickness, and/or thermal coefficient of expansion (TCE) of the TCO compensation layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.