Scanning probe having micro-tip, method and apparatus for manufacturing the same
US11579169B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 18, 2021 |
| Grant date | Feb 14, 2023 |
| Priority date | — |
| Expiry date | Sep 18, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J2003/2806
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present disclosure provides a scanning probe, a method and an apparatus for manufacturing the scanning probe. The scanning probe includes a base and a micro-tip disposed on an end of the base, wherein at least a section of the micro-tip comprises a lateral surface with a concavely curved generatrix. In the method, an end of a probe precursor is immersed in a corrosive solution by having a length direction of the probe precursor inclined with a liquid surface of the corrosive solution. The probe precursor is corroded by the corrosive solution while a corrosion current of the corroding is monitored. The probe precursor is moved away from the corrosive solution after a magnitude of the corrosion current has a plunge. The apparatus includes a container containing the corrosive solution, and a driving device configured to move the probe precursor in the container through a fastener.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.