Metallic grating

US11579344B2 · kind B2 · utility

Assignee

• Government of the United States of America, as represented by the Secretary of Commerce · US

Inventors

• Daniel Josell · Gaithersburg, US
• Thomas P. Moffat · Gaithersburg, US

Key dates

• Filing date: Jun 10, 2020
• Grant date: Feb 14, 2023
• Expiry date: Aug 23, 2040

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B5/1861
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A metallic grating includes a substrate; a plurality of high aspect ratio trenches disposed in the substrate such that the high aspect ratio trenches are spaced apart from one another by a field surface of the substrate; a metallic superconformal filling formed and disposed in the high aspect ratio trenches; and a grating including a spatial arrangement of the high aspect ratio trenches that are filled with the metallic superconformal filling such that the metallic superconformal filling is void-free, and the high aspect ratio trenches are bottom-up filled with the metallic superconformal filling, wherein a height of the metallic superconformal filling is less than or equal to the height of the high aspect ratio trenches.