Silicon grating with amorphous silicon perturbation
US11579365B2 · kind B2 · utility
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20Claims
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Key dates
| Filing date | Apr 14, 2021 |
| Grant date | Feb 14, 2023 |
| Priority date | — |
| Expiry date | Apr 14, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B2006/12107
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A waveguide grating. The waveguide grating includes a rib composed of a first material. A first portion of the waveguide has a first layer on the rib, the first layer being composed of a second material; and a second layer on the first layer, the second layer being composed of a third material, the third material having a higher index of refraction than the first material.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.