Patent · US Active

Silicon grating with amorphous silicon perturbation

US11579365B2 · kind B2 · utility

0Cited by
3References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateApr 14, 2021
Grant dateFeb 14, 2023
Priority date
Expiry dateApr 14, 2041

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG02B2006/12107
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

A waveguide grating. The waveguide grating includes a rib composed of a first material. A first portion of the waveguide has a first layer on the rib, the first layer being composed of a second material; and a second layer on the first layer, the second layer being composed of a third material, the third material having a higher index of refraction than the first material.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.