Gas trap system having a conical inlet condensation region
US11583793B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Oct 8, 2019 |
| Grant date | Feb 21, 2023 |
| Priority date | — |
| Expiry date | May 29, 2041 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/4412
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A gas trap system for metal organic chemical vapor deposition (MOCVD) exhaust abatement operations is provided. The gas trap system may include a housing including an inlet configured to receive exhaust gas and an outlet. The gas trap system may also include a conical inlet shield positioned within the housing. The conical inlet shield may form a first path between the housing and the conical inlet shield, wherein the first path receives the exhaust gas from the inlet. The conical inlet shield may also cool the exhaust gas and cause the exhaust gas to be uniformly distributed in the first path. The gas trap system may also include a filter configured to receive the exhaust gas from the first path and to filter the exhaust gas, wherein the filtered gas exhaust is provided to the outlet.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.