Substrate carrier deterioration detection and repair
US11584019B2 · kind B2 · utility
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10References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 7, 2020 |
| Grant date | Feb 21, 2023 |
| Priority date | — |
| Expiry date | Jan 10, 2041 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49771
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus for semiconductor manufacturing includes an input port to receive a carrier, wherein the carrier includes a carrier body, a housing installed onto the carrier body, and a filter installed between the carrier body and the housing. The apparatus further includes a first robotic arm to uninstall the housing from the carrier and to reinstall the housing into the carrier; one or more second robotic arms to remove the filter from the carrier and to install a new filter into the carrier; and an output port to release the carrier to production.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.