Dual-output microelectromechanical resonator and method of manufacture and operation thereof
US11584635B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 8, 2022 |
| Grant date | Feb 21, 2023 |
| Priority date | — |
| Expiry date | Apr 8, 2042 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03H2250/00
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A dual-output microelectromechanical system (MEMS) resonator can be operated selectively and concurrently in an in-plane mode of vibration and an out-of-plane mode of vibration to obtain, respectively, a first electrical signal having a first frequency and a second electrical signal having a second frequency that is less than the first frequency. The first and second electrical signals are mixed to obtain a third electrical signal having a third frequency, where the third frequency is proportional to a temperature of the MEMS resonator. The temperature is determined based on the third frequency. Values of the first and second frequencies can be adjusted based on the determined temperature to compensate for frequency deviations due to temperature deviations. Also described herein are methods and systems for determining the temperature of the dual-output MEMS and for performing frequency compensation, as well as a method of manufacturing the dual-output MEMS.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.