Method for producing a micromechanical device having inclined optical windows, and corresponding micromechanical device

US11584640B2 · kind B2 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Benjamin Steuer · Waldenbuch, DE
• Stefan Pinter · Reutlingen, DE

Key dates

• Filing date: Mar 7, 2019
• Grant date: Feb 21, 2023
• Expiry date: May 24, 2039

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B81C2203/054
• WIPO field: Micro-structural and nano-technology
• WIPO sector: Chemistry

Abstract

A method for producing a micromechanical device having inclined optical windows, and a corresponding micromechanical device are described. The production method includes: providing a first substrate having a front side and a rear side; forming a plurality of spaced-apart through holes in the first substrate which are arranged along a plurality of spaced-apart rows in the first substrate; forming a respective continuous beveled groove along each of the rows, the grooves defining a seat for the inclined optical windows; and inserting the optical windows into the grooves above the through holes.