Primary vacuum pump of dry type and method for controlling the injection of a purge gas
US11585342B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 26, 2019 |
| Grant date | Feb 21, 2023 |
| Priority date | — |
| Expiry date | Jun 8, 2040 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF04C2280/02
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A dry type primary vacuum pump is provided, including at least two pumping stages mounted in series between a suction and a discharge of the pump; two rotors extending in the pumping stages and being configured to rotate synchronously in a reverse direction to drive a gas to be pumped between the suction and the discharge; an injection device configured to distribute a purge gas in at least one pumping stage, the injection device including at least one injector and at least one injection valve with an on or off control configured to be interposed between a purge gas supply source and the injector; and a control device configured to control opening and closing of the injection valve to inject a purge gas by successive pulses into the at least one pumping stage. A method for controlling the injection of a purge gas the vacuum pump is also provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.