MEMS wave gyroscope
US11585659B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 31, 2021 |
| Grant date | Feb 21, 2023 |
| Priority date | — |
| Expiry date | Dec 31, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5663
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention is to provide a MEMS wave gyroscope with improved sensitivity. The MEMS wave gyroscope includes a base; an anchor structure fixed to the base; and a volatility structure suspended above the base. The volatility structure includes N horizontal beams and M straight beams for being interlaced to form M nodes. The horizontal beam is divided into M−1 first beam units by the nodes. The straight beam is divided into N−1 second beam units by the nodes. A first in-surface transducer is formed by the second beam unit coupled with a mechanical field and an electric field of the second beam unit on two opposite sides along the second axis. A first out-surface transducer is formed by at least one of two opposite sides of the second beam coupled with the mechanical field and electric field of the second beam unit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.