Gas sensing device and a method for sensing gas
US11585773B2 · kind B2 · utility
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24Claims
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Key dates
| Filing date | Sep 24, 2019 |
| Grant date | Feb 21, 2023 |
| Priority date | — |
| Expiry date | Feb 20, 2040 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/764
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A gas sensing device, comprising a bulk and an array of gas sensing elements that are thermally isolated from the bulk, wherein each gas sensing element of a plurality of gas sensing elements of the array comprises (i) a gas reactive element that has a gas dependent temperature parameter; (ii) a semiconductor temperature sensing element that is thermally coupled to the gas reactive element and is configured to generate detection signals that are responsive to a temperature of the gas reactive element; and (iii) multiple heating elements that are configured to heat the gas reactive element to at least one predefined temperature.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.