Electrically isolated pin-lifter
US11587819B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 28, 2019 |
| Grant date | Feb 21, 2023 |
| Priority date | — |
| Expiry date | May 20, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/68742
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A pin lifting device is disclosed and configured for moving and positioning a substrate to be processed in an atmosphere region provided by a vacuum process chamber. The pin lifting device includes a coupling part having a coupling adapted to receive a support pin adapted to contact and support the substrate, and a drive part having a drive unit adapted to cooperate with the coupling by means of an adjusting member such that the coupling is controllably adjustable from a lowered normal position to an extended support position and back. The pin lifting device also has an insulating component located between the drive part and the coupling part and providing complete galvanic isolation between the drive part and the coupling part.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.