Organic vapor jet print head for depositing thin film features with high thickness uniformity
US11588140B2 · kind B2 · utility
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19References
12Claims
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Key dates
| Filing date | Jan 11, 2019 |
| Grant date | Feb 21, 2023 |
| Priority date | — |
| Expiry date | Jan 11, 2039 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02E10/549
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Devices for deposition of material via organic vapor jet printing (OVJP) and similar techniques are provided. The depositor includes delivery channels ending in delivery apertures, where the delivery channels are flared as they approach the delivery apertures, and/or have a trapezoidal shape. The depositors are suitable for fabricating OLEDs and OLED components and similar devices.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.