Patent · US Active

MEMS sound transducer

US11589169B2 · kind B2 · utility

1Cited by

6References

17Claims

0Family size

Assignee

Fraunhofer-Gesellschaft zur förderung der angewandten Forschung e.V. · DE

Inventors

Malte Florian NIEKIEL · Itzehoe, DE
Fabian STOPPEL · Itzehoe, DE
Thomas Lisec · Itzehoe, DE

Key dates

Filing date	Dec 3, 2019
Grant date	Feb 21, 2023
Priority date	—
Expiry date	Dec 3, 2039

Classification

Technology area (CPC H)Electricity
CPC primaryH04R2217/01
WIPO fieldAudio-visual technology
WIPO sectorElectrical engineering

Abstract

A MEMS sound transducer includes a substrate, a membrane formed within the substrate, and a bending actuator applied onto the membrane. The membrane includes at least one integrated permanent magnet and is electrodynamically controllable. The bending actuator can be piezoelectrically controlled separately from the membrane.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.