Particle collection device and mask cleaning device having the same
US11590542B2 · kind B2 · utility
0Cited by
1References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 1, 2020 |
| Grant date | Feb 28, 2023 |
| Priority date | — |
| Expiry date | Feb 4, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10K59/873
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A particle collection device includes a collection sheet and a frame on which the collection sheet is mounted. The collection sheet includes a base sheet, a magnetic substance, and a metal protrusion disposed on the base sheet to be adjacent to the magnetic substance.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.