Patent · US Active

Method for operating a capacitive MEMS sensor, and capacitive MEMS sensor

US11591209B2 · kind B2 · utility

0Cited by

2References

16Claims

0Family size

Assignee

Robert Bosch GmbH · DE

Inventors

Francesco Diazzi · Munich, DE
Andrea Visconti · Munich, DE
Luca Valli · Villach, AT

Key dates

Filing date	Jan 20, 2020
Grant date	Feb 28, 2023
Priority date	—
Expiry date	Mar 13, 2040

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB81B2201/0242
WIPO fieldMicro-structural and nano-technology
WIPO sectorChemistry

Abstract

A method for operating a capacitive MEMS sensor. The method includes: supplying a defined electrical potential on a deflectably mounted, seismic mass of the MEMS sensor; capacitively inducing a vibrational motion of the seismic mass with the aid of a clocked electrical control voltage; compensating for fluctuations in the supplied electrical potential on the seismic mass caused by the clocked electrical control voltage, by selectively charging and/or discharging an electrical storage element connected to the seismic mass in accordance with the frequency of the clocked electrical control voltage.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.