System and method for detecting a thickness of a layer
US11592380B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 17, 2018 |
| Grant date | Feb 28, 2023 |
| Priority date | — |
| Expiry date | Dec 17, 2038 |
Classification
- Technology area (CPC A)Human Necessities
- CPC primaryA61B5/442
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A thickness analyzer unit for determining a thickness of a layer includes a temperature change device, a temperature sensor, a memory, and a controller. The temperature change device is configured to induce a temperature change of the layer from a first temperature value to a second temperature value. The temperature sensor is configured to generate first temperature data corresponding to the first temperature value and second temperature data corresponding to the second temperature value. The memory is configured to store the first and second temperature values, a thermal conductivity value, a specific thermal capacity value, and a density value. The controller is configured (i) to determine a time constant value of the layer based on the first and second temperature values, and (ii) to determine the thickness of the layer based on the time constant value, the thermal conductivity value, the specific thermal capacity value, and the density value.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.