Patent · US Active

System and method for detecting a thickness of a layer

US11592380B2 · kind B2 · utility

0Cited by
2References
14Claims
0Family size

Assignee

Inventors

Key dates

Filing dateDec 17, 2018
Grant dateFeb 28, 2023
Priority date
Expiry dateDec 17, 2038

Classification

  • Technology area (CPC A)Human Necessities
  • CPC primaryA61B5/442
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A thickness analyzer unit for determining a thickness of a layer includes a temperature change device, a temperature sensor, a memory, and a controller. The temperature change device is configured to induce a temperature change of the layer from a first temperature value to a second temperature value. The temperature sensor is configured to generate first temperature data corresponding to the first temperature value and second temperature data corresponding to the second temperature value. The memory is configured to store the first and second temperature values, a thermal conductivity value, a specific thermal capacity value, and a density value. The controller is configured (i) to determine a time constant value of the layer based on the first and second temperature values, and (ii) to determine the thickness of the layer based on the time constant value, the thermal conductivity value, the specific thermal capacity value, and the density value.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.