Device and method for detecting particles and method for manufacturing same

US11592384B2 · kind B2 · utility

Assignee

• COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES · FR

Inventors

• Mathieu Dupoy · Voiron, FR
• Laurent Frey · Fontaine, FR
• Serge Gidon · La Murette, FR

Key dates

• Filing date: Dec 8, 2020
• Grant date: Feb 28, 2023
• Expiry date: Jul 23, 2041

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N2015/1493
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A device for detecting (D) at least one predetermined particle (P) includes an interferometric element (EI) arranged so as to be illuminated by an incident radiation (Lin) and comprising at least one so-called thin layer (CM) disposed on top of a so-called substrate layer (Sub), the particle being attached to a surface (Sm) of the thin layer, the interferometric element (EI) forming a Fabry-Pérot cavity with or without attached particle P; a matrix sensor (Det) adapted to detect an image comprising a first portion (P1) deriving from the detection of the incident radiation transmitted (LTBG) by the interferometric element alone and a second portion (P2) deriving from the detection of the incident radiation transmitted (LTP) by the interferometric element and any particle (O, P) attached to a surface (Sm) of the thin layer; a processor (UT) linked to the sensor and configured: to calculate, as a function of wavelengths of the incident radiation λi i∈[1,m], the variation of intensity of at least one first pixel of the first portion, called first variation (FBG) and of at least one second pixel of the second portion, called second variation (FP), to determine a trend, as a function of …