Patent · US Active

Impedance tuners with linear actuators

US11592476B2 · kind B2 · utility

0Cited by
9References
34Claims
0Family size

Assignee

Inventors

Key dates

Filing dateSep 17, 2020
Grant dateFeb 28, 2023
Priority date—
Expiry dateJun 17, 2041

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH03J1/08
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

The accuracy of an impedance tuner may be improved and the size may be reduced by using linear actuators instead of rotary motors. The linear actuator may be integrated with position sensors to allow very small size, and implemented with a servo system for best accuracy and speed. Spring loaded arms holding the mismatch probes allow the tuner to operate in any orientation to further fit into small spaces. The small size reduces losses by allowing direct connection to wafer probes for on-wafer measurement systems.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.