MEMs device and electronic device
US11594670B2 · kind B2 · utility
1Cited by
0References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 19, 2020 |
| Grant date | Feb 28, 2023 |
| Priority date | — |
| Expiry date | May 8, 2041 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81C2203/019
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
An MEMS device includes: a first member; a second member forming a sealed space with the first member therebetween; and a third member disposed between the first member and the second member and joined to the first member and the second member, in which the third member has lower rigidity than rigidity of the first member and the second member, and the third member is provided with a communication portion that establishes communication between the sealed space and an external space.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.