Tailoring of high power VCSEL arrays
US11594857B2 · kind B2 · utility
1Cited by
6References
16Claims
0Family size
Assignee
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Key dates
| Filing date | Feb 15, 2019 |
| Grant date | Feb 28, 2023 |
| Priority date | — |
| Expiry date | Feb 23, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S2301/18
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Modification of the topology of selected regions of individual VCSEL devices during fabrication is utilized to provide an array output beam with specific characteristics (e.g., “uniform” output power across the array). These physical features include the width of the metal aperture, the width of the modal filter, and/or the geometry of the contact ring structure on the top of the VCSEL device. The modifications may also function to adjust the numerical apertures (NAs) of the devices, the beam waist, wallplug efficiency, and the like.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.