Patent · US Active

VCSEL array layout

US11594860B2 · kind B2 · utility

0Cited by
11References
6Claims
0Family size

Assignee

Inventors

Key dates

Filing dateNov 19, 2018
Grant dateFeb 28, 2023
Priority date
Expiry dateJul 22, 2039

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01S5/0042
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

An array layout of VCSELs is intentionally mis-aligned with respect to the xy-plane of the device structure as defined by the crystallographic axes of the semiconductor material. The mis-alignment may take the form of skewing the emitter array with respect to the xy-plane, or rotating the emitter array. In either case, the layout pattern retains the desired, row/column structure (necessary for dicing the structure into one-dimensional arrays) while reducing the probability that an extended defect along a crystallographic plane will impact a large number of individual emitters.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.