Film bulk acoustic resonator including recessed frame with scattering sides
US11595018B2 · kind B2 · utility
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1References
24Claims
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Key dates
| Filing date | May 19, 2020 |
| Grant date | Feb 28, 2023 |
| Priority date | — |
| Expiry date | Mar 11, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH04B1/40
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A film bulk acoustic wave resonator (FBAR) comprises a recessed frame region including an undulating perimeter.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.