MEMS speaker
US11595758B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 16, 2021 |
| Grant date | Feb 28, 2023 |
| Priority date | — |
| Expiry date | Feb 16, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH04R2499/11
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A MEMS speaker can include an electrostatically driven, corrugated MEMS structure to move air without a magnet, coil, or traditional speaker membrane, and thus provide a low-power, compact speaker with a large acoustically active area in a small volume. Neighboring folds in the corrugated MEMS structure may form pairs of MEMS electrodes that can be pushed together and/or pulled apart to deform the MEMS structure in a breathing motion that generates pressure differentials on opposing sides of the corrugated MEMS structure to generate sound.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.