Methods and apparatuses for emitting electrons from a hollow cathode
US11596049B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Feb 23, 2021 |
| Grant date | Feb 28, 2023 |
| Priority date | — |
| Expiry date | Feb 23, 2041 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J33/00
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
Methods and apparatuses for emitting electrons from a hollow cathode are provided. The cathode includes a plasma holding region configured to hold a plasma, a gas supply source configured to supply gas to the plasma holding region, and an orifice plate disposed on a periphery of the plasma holding region. The orifice plate comprises a plurality of openings constructed to receive electrons from the plasma. The plurality of openings decouple gas conductance and electrical conductance across the orifice plate. The diameters of the plurality of openings are within a range of 20%-60%, inclusive, of a diameter of a circular opening with an area equal to a sum of the areas of the plurality of openings.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.