High dynamic range picometer metrology systems and methods
US11598628B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 14, 2018 |
| Grant date | Mar 7, 2023 |
| Priority date | — |
| Expiry date | Jan 6, 2042 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B9/02064
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Systems and methods for measuring displacements at the picometer level are provided. A system can include a Michelson interferometer having a fixed arm and a measurement arm. As the length of the measurement arm changes, the output supplied to the interferometer from a variable wavelength light source is changed until the intensity of the resulting inference pattern is maximized. The wavelength of the light at the point the interference pattern is maximized is then measured by mixing light from the light source with the output from a frequency comb generator. The resulting frequency measurement is then converted to a length measurement.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.