Plasmonically enhanced, ultra-sensitive bolometric mid-infrared detector
US11598672B2 · kind B2 · utility
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2References
20Claims
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Key dates
| Filing date | Dec 8, 2021 |
| Grant date | Mar 7, 2023 |
| Priority date | — |
| Expiry date | Dec 8, 2041 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J2005/0077
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention features a novel design for a bolometric infrared detector focused on LWIR range for human body high-resolution temperature sensing. The present invention incorporates an efficient plasmonic absorber and VO2 nanobeam to facilitate improvement in both aspects—thermal resolution and spatial resolution. The present invention significantly improves the detectivity, NETD, and responsivity for a smaller form-factor detector active area.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.