Patent · US Active

Plasmonically enhanced, ultra-sensitive bolometric mid-infrared detector

US11598672B2 · kind B2 · utility

0Cited by
2References
20Claims
0Family size

Assignee

Inventors

Key dates

Filing dateDec 8, 2021
Grant dateMar 7, 2023
Priority date
Expiry dateDec 8, 2041

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01J2005/0077
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

The present invention features a novel design for a bolometric infrared detector focused on LWIR range for human body high-resolution temperature sensing. The present invention incorporates an efficient plasmonic absorber and VO2 nanobeam to facilitate improvement in both aspects—thermal resolution and spatial resolution. The present invention significantly improves the detectivity, NETD, and responsivity for a smaller form-factor detector active area.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.